removing shutdown

Ray Seymour seymour at snf.stanford.edu
Tue Jul 17 08:38:47 PDT 2001


The load zone is running a little cold  but the oxidation that was done
last was prettty uniform as per Eric. I will leave the tool up for use
until the faulty part can be replaced. The center zone temp is flat and
the wafers are in the center zone.
Ray Seymour
4-7425




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