From latta at snf.stanford.edu Fri Mar 22 14:34:12 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Fri, 22 Mar 2002 14:34:12 -0800 (PST) Subject: Tylan7 back to silicide furnace Message-ID: Folks, Since tylans 1-4 ware all working, tylan7 is offically back to it's normal status of silicide furnace. Also, a report of thin oxide growth has been checked out by running WET1000 for 00:12:00. Over a 35 wafer spread the oxide thicknesses were as expected. Nancy