Tylan7 back to silicide furnace

Nancy Latta latta at snf.stanford.edu
Fri Mar 22 14:34:12 PST 2002


Since tylans 1-4 ware all working, tylan7 is offically back to it's
normal status of silicide furnace.

Also, a report of thin oxide growth has been checked out by running
WET1000 for 00:12:00.  Over a 35 wafer spread the oxide thicknesses were
as expected.


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