From latta at snf.stanford.edu  Thu Aug 14 10:39:06 2003
From: latta at snf.stanford.edu (Nancy Latta)
Date: Thu, 14 Aug 2003 10:39:06 -0700
Subject: Thin ox advice, please
Message-ID: <3F3BC93A.8040502@snf.stanford.edu>

Folks,

I need to grow a mere 10 nm of oxide and don't have a lot of experience 
with films this thin.  Does someone have a program (I assume DRY800 or 
850) and time that they have used with some success?

Thanks,

				Nancy

-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu