Thin ox advice, please

Nancy Latta latta at
Thu Aug 14 10:39:06 PDT 2003


I need to grow a mere 10 nm of oxide and don't have a lot of experience 
with films this thin.  Does someone have a program (I assume DRY800 or 
850) and time that they have used with some success?



Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at

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