Tylan4 is now gold contaminated!

Nancy Latta latta at snf.stanford.edu
Fri Aug 6 18:12:08 PDT 2004


As per the general plan for furnaces in SNF, tylan4 is now a gold 
contaminated furnace.  Red signs have been placed at the furnace and at 
the lab entrance to tell labmembers of this change in the cleanliness 
status of tylan4.

Thermco1 and thermco2 are clean oxidation systems which accommodate four 
and six inch wafers.  Please contact Maurice (maurice at snf.stanford.edu) 
for information and training.

Please check with the Special Materials Committee if you would like to 
use tylan4.  All materials must be first approved by the committee for 
compatibility with the desired temperature.  The committee may be 
contacted at specmat at snf.stanford.edu.

Please use your own tweezers to load and unload samples from tylan4.  We 
will not provide a vacuum wand for the system.

All of the furnace recipes will remain the same, as will the available 

Please contact me if you have any questions.  My apologies if you 
receive this message twice.  I want to make sure that everyone is 
informed of this important change.


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