From xzhuang at stanford.edu Mon Feb 7 09:50:20 2005 From: xzhuang at stanford.edu (Steve Zhuang) Date: Mon, 7 Feb 2005 09:50:20 -0800 Subject: Thickness problem? Message-ID: <015e01c50d3d$7e14b6a0$bb5640ab@pky7> Hi all, I noticed on tylan1's maintanance section on coral that some user observed severe thickness problem with tylan1 on 1/11/2005. Does anyone know if this problem is solved or does it still exist? I'm planning to use the furnace for a critical run. Thanks Steve Zhuang -------------- next part -------------- An HTML attachment was scrubbed... URL: From vossough at snf.stanford.edu Mon Feb 7 15:35:28 2005 From: vossough at snf.stanford.edu (Kris Vossough) Date: Mon, 7 Feb 2005 15:35:28 -0800 (PST) Subject: Thickness problem? In-Reply-To: <015e01c50d3d$7e14b6a0$bb5640ab@pky7> Message-ID: Hi Steve, I have attempted about 6 or 8, 2um oxidation runs (13 hours total) over the past year. The most recent ones have always had MFS alarms at some point which resulted in less than 2um thick oxide film. Since I have not heard any complaints from other users, I assume this is related to my long runs. I would check with the staff first, but you may want to monitor the run frequently and reset the MFS when/if it alarms. --Kris On Mon, 7 Feb 2005, Steve Zhuang wrote: > Hi all, > > I noticed on tylan1's maintanance section on coral that some user observed severe thickness problem with tylan1 on 1/11/2005. Does anyone know if this problem is solved or does it still exist? I'm planning to use the furnace for a critical run. > > Thanks > > Steve Zhuang