From joshuar at stanford.edu Mon Nov 6 10:27:27 2006 From: joshuar at stanford.edu (Josh Ratchford) Date: Mon, 6 Nov 2006 10:27:27 -0800 Subject: Tylan 1 Reservation canceled 12 pm to 2:30 pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Fri Nov 10 23:19:35 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Fri, 10 Nov 2006 23:19:35 -0800 Subject: tylan free tomorrwo 10:30AM-4:30PM Message-ID: <000a01c70561$bda4a8c0$a9b50c80@sangbumhome> -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Tue Nov 14 00:20:21 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Tue, 14 Nov 2006 00:20:21 -0800 Subject: Last night WET1100A oxidation in tylan2 Message-ID: <000b01c707c5$ba3166e0$a9b50c80@sangbumhome> Dear tylan users, I did oxidation with WET1100A for more than 2 hours (with 10 minutes annealing) expecting 10000A thick oxide. It came out blue color and when I measured the thickness with nanospec (both of them) and ellipsometer, they gave me quite strange numbers. Nanospec gave me ~1350A / 1.466 and ellipsometer gave me 9466A/2.996 (routine 10) or 2465A (routine 11 with n=1.468). Is this too thick for these measurements? Could anyone give me a clue for these? Has anyone seen open tylan2 tube before 10:00 PM (I was expecting it to be open around 10:30 PM)? Thanks, SangBum -------------- next part -------------- An HTML attachment was scrubbed... URL: From kimsangb at stanford.edu Sat Nov 18 10:49:13 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Sat, 18 Nov 2006 10:49:13 -0800 Subject: tylan1 free from 11:00 to 15:30 today Message-ID: <1163875753.455f55a96a90c@webmail.stanford.edu> Could not get the wafer cleaning done due to wbdiff shutdown. From kimsangb at stanford.edu Tue Nov 21 13:39:44 2006 From: kimsangb at stanford.edu (SangBum Kim) Date: Tue, 21 Nov 2006 13:39:44 -0800 Subject: tylan1 free until 4:30PM Message-ID: <1164145184.456372208214e@webmail.stanford.edu> I finished early and it is free now until 4:30PM.