which recipe for thin oxide

Arash Hazeghi ahazeghi at stanford.edu
Thu Feb 14 15:17:23 PST 2008


Folks,

I want to grow 100~150A  high quality oxide on 100 P-substrate, do you have
an idea which recipe will give best uniformity across the wafer? Iin the
past I have used wet recipe with OK results but for way thicker oxides.

 

Thanks,

Arash

 

 

 

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