which recipe for thin oxide

Arash Hazeghi ahazeghi at stanford.edu
Thu Feb 14 15:17:23 PST 2008


I want to grow 100~150A  high quality oxide on 100 P-substrate, do you have
an idea which recipe will give best uniformity across the wafer? Iin the
past I have used wet recipe with OK results but for way thicker oxides.







-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/tylan1/attachments/20080214/bac943ad/attachment.html>

More information about the tylan1 mailing list