From nlatta at stanford.edu Tue Feb 3 12:59:44 2009 From: nlatta at stanford.edu (Nancy Latta) Date: Tue, 03 Feb 2009 12:59:44 -0800 Subject: Thin Oxide Message-ID: <4988B040.70007@stanford.edu> Folks, Is anyone running tylan1 or 2 for 10nm oxides? If so, can you which furnace, temp and time to yoonyoung at snf.stanford.edu? Thanks in advance, -Nancy From ahazeghi at stanford.edu Tue Feb 3 13:06:04 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 3 Feb 2009 13:06:04 -0800 Subject: Thin Oxide In-Reply-To: <4988B040.70007@stanford.edu> References: <4988B040.70007@stanford.edu> Message-ID: <011801c98643$39bf02c0$ad3d0840$@edu> Nancy, Last time I ran Tylan 2 for 20nm oxide (DRY900) uniformity was horrible, has the furnace been fixed since then? Thanks, Arash -----Original Message----- From: Nancy Latta [mailto:nlatta at stanford.edu] Sent: Tuesday, February 03, 2009 1:00 PM To: tylan1 at snf.stanford.edu Subject: Thin Oxide Folks, Is anyone running tylan1 or 2 for 10nm oxides? If so, can you which furnace, temp and time to yoonyoung at snf.stanford.edu? Thanks in advance, -Nancy From ahazeghi at stanford.edu Tue Feb 3 13:27:12 2009 From: ahazeghi at stanford.edu (Arash Hazeghi) Date: Tue, 3 Feb 2009 13:27:12 -0800 Subject: Thin Oxide In-Reply-To: <4988B4C9.9070303@stanford.edu> References: <4988B040.70007@stanford.edu> <011801c98643$39bf02c0$ad3d0840$@edu> <4988B4C9.9070303@stanford.edu> Message-ID: <011c01c98646$2dc7a0a0$8956e1e0$@edu> Last year is a long time ago, back then I was getting good results as well but from Oct. 2008 I was not able to grow anything below 30nm with acceptable uniformity, attached is the thickness measurement for 5 wafers with target thickness 30nm, non-uniformity is as high as 10%. Thanks, Arash -----Original Message----- From: Takane Usui [mailto:takane at stanford.edu] Sent: Tuesday, February 03, 2009 1:19 PM To: Arash Hazeghi Cc: 'Nancy Latta'; yoonyoung at snf.stanford.edu Subject: Re: Thin Oxide I grew 10nm oxide several times last year with DRY750. Uniformity from our TEM images was pretty ok. -Takane Prinz Group Arash Hazeghi wrote: > Nancy, > Last time I ran Tylan 2 for 20nm oxide (DRY900) uniformity was horrible, has > the furnace been fixed since then? > > Thanks, > Arash > > -----Original Message----- > From: Nancy Latta [mailto:nlatta at stanford.edu] > Sent: Tuesday, February 03, 2009 1:00 PM > To: tylan1 at snf.stanford.edu > Subject: Thin Oxide > > Folks, > > Is anyone running tylan1 or 2 for 10nm oxides? If so, can you which > furnace, temp and time to yoonyoung at snf.stanford.edu? > > Thanks in advance, > > -Nancy > > > > -------------- next part -------------- A non-text attachment was scrubbed... Name: 11-7-tylan2-DRY900-1hr.doc Type: application/msword Size: 81408 bytes Desc: not available URL: From eap at gloworm.Stanford.EDU Tue Feb 3 16:51:42 2009 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Tue, 3 Feb 2009 16:51:42 -0800 (PST) Subject: Thin Oxide In-Reply-To: <4988B040.70007@stanford.edu> Message-ID: You can get all that information and more at: http://www.lelandstanfordjunior.com/eData.html USER: data PASSWD: coop There are several such runs that are exactly that, or you can run the graph for DRY 900, say, and it will give you best-fit deal-grove line to the actual data from that tube. -Eric On Tue, 3 Feb 2009, Nancy Latta wrote: > Folks, > > Is anyone running tylan1 or 2 for 10nm oxides? If so, can you which > furnace, temp and time to yoonyoung at snf.stanford.edu? > > Thanks in advance, > > -Nancy > > From gthareja at stanford.edu Mon Feb 16 13:03:23 2009 From: gthareja at stanford.edu (Gaurav Thareja) Date: Mon, 16 Feb 2009 13:03:23 -0800 (PST) Subject: tylan 1 free from 13:00 today Message-ID: <1663151855.256591234818203230.JavaMail.root@zm06.stanford.edu>