ahazeghi at stanford.edu
Tue Feb 3 13:06:04 PST 2009
Last time I ran Tylan 2 for 20nm oxide (DRY900) uniformity was horrible, has
the furnace been fixed since then?
From: Nancy Latta [mailto:nlatta at stanford.edu]
Sent: Tuesday, February 03, 2009 1:00 PM
To: tylan1 at snf.stanford.edu
Subject: Thin Oxide
Is anyone running tylan1 or 2 for 10nm oxides? If so, can you which
furnace, temp and time to yoonyoung at snf.stanford.edu?
Thanks in advance,
More information about the tylan1