Thin Oxide

Arash Hazeghi ahazeghi at
Tue Feb 3 13:06:04 PST 2009

Last time I ran Tylan 2 for 20nm oxide (DRY900) uniformity was horrible, has
the furnace been fixed since then? 


-----Original Message-----
From: Nancy Latta [mailto:nlatta at] 
Sent: Tuesday, February 03, 2009 1:00 PM
To: tylan1 at
Subject: Thin Oxide


Is anyone running tylan1 or 2 for 10nm oxides?  If so, can you which 
furnace, temp and time to yoonyoung at

Thanks in advance,


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