Thin Oxide

Arash Hazeghi ahazeghi at stanford.edu
Tue Feb 3 13:06:04 PST 2009


Nancy,
Last time I ran Tylan 2 for 20nm oxide (DRY900) uniformity was horrible, has
the furnace been fixed since then? 

Thanks,
Arash

-----Original Message-----
From: Nancy Latta [mailto:nlatta at stanford.edu] 
Sent: Tuesday, February 03, 2009 1:00 PM
To: tylan1 at snf.stanford.edu
Subject: Thin Oxide

Folks,

Is anyone running tylan1 or 2 for 10nm oxides?  If so, can you which 
furnace, temp and time to yoonyoung at snf.stanford.edu?

Thanks in advance,

-Nancy





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