Thin Oxide

Eric Perozziello eap at gloworm.Stanford.EDU
Tue Feb 3 16:51:42 PST 2009

You can get all that information and more at:

USER:  data
PASSWD: coop

There are several such runs that are exactly that,
or you can run the graph for DRY 900, say, and
it will give you best-fit deal-grove line to the
actual data from that tube.


On Tue, 3 Feb 2009, Nancy Latta wrote:

> Folks,
> Is anyone running tylan1 or 2 for 10nm oxides?  If so, can you which
> furnace, temp and time to yoonyoung at
> Thanks in advance,
> -Nancy

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