From eap at gloworm.Stanford.EDU Fri Mar 20 15:10:18 2009 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Fri, 20 Mar 2009 14:10:18 -0800 (PST) Subject: TUBE IDLE TEMPERATURE Message-ID: Folks, please, if you run a process in tylan 1 thru 4 that is less than 800C, PLEASE load 800AN or something similar to cause the tube to ramp back up to idle. No need to run the program, just merely load the 800AN program, type in any time, and then do no run it. That's all you need to do. It takes HOURS for the tube to properly stabilize at elevated temperature. Today, several tubes were left at 500C. Thanks From maurice at stanford.edu Fri Mar 20 16:14:14 2009 From: maurice at stanford.edu (maurice stevens) Date: Fri, 20 Mar 2009 16:14:14 -0700 Subject: TUBE IDLE TEMPERATURE In-Reply-To: References: Message-ID: <49C42346.3040304@stanford.edu> Each day this week, I loaded 500AN (bringing the standby temp to 500c instead of 800c) on any tylanoxide that did not have a reservation two days in the future. If you look at the coral history, only Tylan4 was used this week. We saved some energy this week! As always, you should check the temp of the tylan tubes before running an oxide or anneal to make sure it is at the correct temperature for your recipe. (In my training, I recommend users check the temperature right before they start cleaning their wafers so there will be at least an hour of ramp time.) If it is not at the correct temperature, load your desired recipe and allow the tube temp to reach your desired temperature. Eric Perozziello wrote: > Folks, please, if you run a process in tylan 1 thru 4 that > is less than 800C, PLEASE load 800AN or something similar to > cause the tube to ramp back up to idle. No need to run > the program, just merely load the 800AN program, type in any > time, and then do no run it. That's all you need to do. > > It takes HOURS for the tube to properly stabilize at > elevated temperature. > > Today, several tubes were left at 500C. > > Thanks > > > -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278