Use of Steam in Ox Furnaces

Mary Tang mtang at
Wed Aug 28 19:27:04 PDT 2002

I'm forwarding a note that Nancy wrote (below) as a warning for use of
oxidation furnaces...  We'll keep you posted...


During TCA testing last night or this morning crud, probably from
the TCA bubbler or the TCA lines to oxditation tubes 1-4, was
introducted into the tubes via the injectors.

A short TCA dry clean was performed after the TCA lines were
so we are fairly confident that the tubes are not contaminated.
may, however, be an issue when the injectors have gases flowing

Rather than shut down all the funaces, we are sending this warning
against using wet programs in tylans1-4.  If possible, please delay
steam oxidation processing until we have more information.

A message describing all the events and issues should be forthcoming,
but since you have all reserved ox furnaces for tonight or tomorrow
morning you are receiving this advance warning.

Thanks and appologies for any confusion of hassle this causes.

Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at

Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

More information about the tylan2-pcs mailing list