Uniformity test after pull & clean

Nancy Latta latta at snf.stanford.edu
Wed Dec 18 17:00:30 PST 2002


Results of the WET900 00:39:00 run after the pull and clean.  Uniformity
is 25%....


Wf  Center      Top        Bottom     Right      Left 
F   1132 1.465  937 1.469  865 1.469  911 1.469  907 1.469
2   937 1.469   961 1.469  906 1.469  947 1.468  935 1.469
3   1010 1.466  981 1.468  936 1.469  969 1.468  961 1.469
B   987 1.468   995 1.468  978 1.469  911 1.468  981 1.469

Another test will be run after NEWTCA is run in the tube, as per folks
at TyStar.

-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



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