Uniformity test after pull & clean
Nancy Latta
latta at snf.stanford.edu
Wed Dec 18 17:00:30 PST 2002
Results of the WET900 00:39:00 run after the pull and clean. Uniformity
is 25%....
Wf Center Top Bottom Right Left
F 1132 1.465 937 1.469 865 1.469 911 1.469 907 1.469
2 937 1.469 961 1.469 906 1.469 947 1.468 935 1.469
3 1010 1.466 981 1.468 936 1.469 969 1.468 961 1.469
B 987 1.468 995 1.468 978 1.469 911 1.468 981 1.469
Another test will be run after NEWTCA is run in the tube, as per folks
at TyStar.
--
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu
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