From seymour at snf.stanford.edu  Mon Mar 11 09:49:10 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 11, 2002 9:49:10 AM
Subject: Shutdown tylan2 2002-03-08 17:33:58: Oxidation failure
Message-ID: <mailman.55.1356283645.4932.tylan2-pcs@snf.stanford.edu>

MFS 460 in manual



From seymour at snf.stanford.edu  Mon Mar 11 09:50:21 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 11, 2002 9:50:21 AM
Subject: Problem tylan2 2002-03-08 17:11:36: Wrong oxide thickness growth
Message-ID: <mailman.56.1356283645.4932.tylan2-pcs@snf.stanford.edu>

MFS 460 not in auto