From latta at snf.stanford.edu Tue Oct 1 04:08:28 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 1, 2002 4:08:28 PM Subject: Shutdown tylan2 2002-10-01 16:08:28: H2/O2 leak during NEWTCA Message-ID: Aborted process in Step 25.... From seymour at snf.stanford.edu Thu Oct 3 09:23:46 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 3, 2002 9:23:46 AM Subject: Shutdown tylan2 2002-10-01 16:08:28: H2/O2 leak during NEWTCA Message-ID: Rezored the MFS460 H2 controller. Did auto zero reoutine on the MFS460. Replaced fan for TCA thermo cooler. Ran wet700 to test (BOT). Needs testing prior to release From seymour at snf.stanford.edu Thu Oct 3 09:24:05 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Oct 3, 2002 9:24:05 AM Subject: Shutdown tylan2 2002-10-03 09:24:03: Needs test after repair Message-ID: From latta at snf.stanford.edu Thu Oct 3 01:45:55 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Oct 3, 2002 1:45:55 PM Subject: Shutdown tylan2 2002-10-03 09:24:03: Needs test after repair Message-ID: Tested by running NEWTCA. Worked fine..... From latta at snf.stanford.edu Mon Oct 28 17:06:55 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 28 Oct 2002 17:06:55 -0800 Subject: Test Message-ID: <3DBDDF2F.DBB558FC@snf.stanford.edu> Just testing -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From latta at snf.stanford.edu Mon Oct 28 17:24:40 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 28 Oct 2002 17:24:40 -0800 Subject: Uniformity monitor test results Message-ID: <3DBDE358.6566302@snf.stanford.edu> (Now that I have determined that the mail list works outside of a problem/comment/shutdown clear in coral.....) Here are the results of the WET900 for 00:39:00 test done 10/25/02. Results measured using ellipsometer, both oxide thickness and refractive index are given. Wf pos Center Top Left Bottom Right Avr 1 Front 1033/1.468 1038/1.468 1033/1.469 1027/1.469 1027/1.469 1032A 2 1037/1.468 1040/1.468 1036/1.468 1031/1.468 1036/1.468 1036A 3 1049/1.468 1057/1.467 1048/1.468 1043/1.468 1059/1.467 1051A 4 Back 1070/1.468 1073/1.468 1066/1.468 1063/1.468 1072/1.467 1069A -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From mcvittie at snf.stanford.edu Mon Oct 28 17:21:24 2002 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Mon, 28 Oct 2002 17:21:24 -0800 Subject: Uniformity monitor test results References: <3DBDE358.6566302@snf.stanford.edu> Message-ID: <3DBDE294.2F4CE0C4@snf.stanford.edu> Nancy, I assume your results were for Tylan tube #4. I just looked at my tube #4 calibration results for the measured H2/O2 flow ration for an O2 set point of 1000 sccm. It was 1.52. The error of 1.2% high is consisted with growth rate being a little high. Lets see how the other furnaces do for the same oxidation conditions and how repeatable these results are. The increased oxidation rate (+3.6%) at the back of the boat suggests that the controller is not correcting fully for the H2/O2 torch. Thanks Jim Nancy Latta wrote: > (Now that I have determined that the mail list works outside of a > problem/comment/shutdown clear in coral.....) > > Here are the results of the WET900 for 00:39:00 test done 10/25/02. > Results measured using ellipsometer, both oxide thickness and refractive > index are given. > > Wf pos Center Top Left Bottom Right > Avr > > 1 Front 1033/1.468 1038/1.468 1033/1.469 1027/1.469 1027/1.469 > 1032A > 2 1037/1.468 1040/1.468 1036/1.468 1031/1.468 1036/1.468 > 1036A > 3 1049/1.468 1057/1.467 1048/1.468 1043/1.468 1059/1.467 > 1051A > 4 Back 1070/1.468 1073/1.468 1066/1.468 1063/1.468 1072/1.467 > 1069A > > > -- > Nancy Latta > Stanford Nanofabrication Facility > CIS Room 145 > 420 Via Palou Mall > Stanford, CA 94305-4070 > (650) 725-6727 > latta at snf.stanford.edu From latta at snf.stanford.edu Mon Oct 28 17:56:17 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 28 Oct 2002 17:56:17 -0800 Subject: Uniformity monitor test results References: <3DBDE358.6566302@snf.stanford.edu> <3DBDE294.2F4CE0C4@snf.stanford.edu> Message-ID: <3DBDEAC1.AE9E4142@snf.stanford.edu> No, the results are correctly listed under tylan2. I was unable to complete tylan4 today. Tomorrow. Nancy Jim McVittie wrote: > > Nancy, > > I assume your results were for Tylan tube #4. I just looked at my tube #4 > calibration results for the measured H2/O2 flow ration for an O2 set point > of 1000 sccm. It was 1.52. The error of 1.2% high is consisted with growth > rate being a little high. Lets see how the other furnaces do for the same > oxidation conditions and how repeatable these results are. The increased > oxidation rate (+3.6%) at the back of the boat suggests that the controller > is not correcting fully for the H2/O2 torch. > Thanks Jim > > Nancy Latta wrote: > > > (Now that I have determined that the mail list works outside of a > > problem/comment/shutdown clear in coral.....) > > > > Here are the results of the WET900 for 00:39:00 test done 10/25/02. > > Results measured using ellipsometer, both oxide thickness and refractive > > index are given. > > > > Wf pos Center Top Left Bottom Right > > Avr > > > > 1 Front 1033/1.468 1038/1.468 1033/1.469 1027/1.469 1027/1.469 > > 1032A > > 2 1037/1.468 1040/1.468 1036/1.468 1031/1.468 1036/1.468 > > 1036A > > 3 1049/1.468 1057/1.467 1048/1.468 1043/1.468 1059/1.467 > > 1051A > > 4 Back 1070/1.468 1073/1.468 1066/1.468 1063/1.468 1072/1.467 > > 1069A > > > > > > -- > > Nancy Latta > > Stanford Nanofabrication Facility > > CIS Room 145 > > 420 Via Palou Mall > > Stanford, CA 94305-4070 > > (650) 725-6727 > > latta at snf.stanford.edu -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu