Uniformity monitor test results

Nancy Latta latta at snf.stanford.edu
Mon Oct 28 17:24:40 PST 2002


(Now that I have determined that the mail list works outside of a
problem/comment/shutdown clear in coral.....)

Here are the results of the WET900 for 00:39:00 test done 10/25/02. 
Results measured using ellipsometer, both oxide thickness and refractive
index are given.

Wf pos     Center      Top         Left        Bottom      Right      
Avr

1 Front    1033/1.468  1038/1.468  1033/1.469  1027/1.469  1027/1.469 
1032A 
2          1037/1.468  1040/1.468  1036/1.468  1031/1.468  1036/1.468 
1036A
3          1049/1.468  1057/1.467  1048/1.468  1043/1.468  1059/1.467 
1051A
4 Back     1070/1.468  1073/1.468  1066/1.468  1063/1.468  1072/1.467 
1069A 

   
-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



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