Uniformity monitor test results

Jim McVittie mcvittie at snf.stanford.edu
Mon Oct 28 17:21:24 PST 2002


Nancy,

I assume your results were for Tylan tube #4. I just looked at my tube #4
calibration results for the measured H2/O2 flow ration for an O2 set point
of 1000 sccm. It was 1.52. The error of 1.2% high is consisted with growth
rate being a little high.  Lets see how the other furnaces do for the same
oxidation conditions and how repeatable these results are. The increased
oxidation rate (+3.6%) at the back of the boat suggests that the controller
is not correcting fully for the H2/O2 torch.
        Thanks     Jim

Nancy Latta wrote:

> (Now that I have determined that the mail list works outside of a
> problem/comment/shutdown clear in coral.....)
>
> Here are the results of the WET900 for 00:39:00 test done 10/25/02.
> Results measured using ellipsometer, both oxide thickness and refractive
> index are given.
>
> Wf pos     Center      Top         Left        Bottom      Right
> Avr
>
> 1 Front    1033/1.468  1038/1.468  1033/1.469  1027/1.469  1027/1.469
> 1032A
> 2          1037/1.468  1040/1.468  1036/1.468  1031/1.468  1036/1.468
> 1036A
> 3          1049/1.468  1057/1.467  1048/1.468  1043/1.468  1059/1.467
> 1051A
> 4 Back     1070/1.468  1073/1.468  1066/1.468  1063/1.468  1072/1.467
> 1069A
>
>
> --
> Nancy Latta
> Stanford Nanofabrication Facility
> CIS Room 145
> 420 Via Palou Mall
> Stanford, CA 94305-4070
> (650) 725-6727
> latta at snf.stanford.edu




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