Uniformity monitor test results

Nancy Latta latta at snf.stanford.edu
Mon Oct 28 17:56:17 PST 2002


No, the results are correctly listed under tylan2.

I was unable to complete tylan4 today.  Tomorrow.

				Nancy

Jim McVittie wrote:
> 
> Nancy,
> 
> I assume your results were for Tylan tube #4. I just looked at my tube #4
> calibration results for the measured H2/O2 flow ration for an O2 set point
> of 1000 sccm. It was 1.52. The error of 1.2% high is consisted with growth
> rate being a little high.  Lets see how the other furnaces do for the same
> oxidation conditions and how repeatable these results are. The increased
> oxidation rate (+3.6%) at the back of the boat suggests that the controller
> is not correcting fully for the H2/O2 torch.
>         Thanks     Jim
> 
> Nancy Latta wrote:
> 
> > (Now that I have determined that the mail list works outside of a
> > problem/comment/shutdown clear in coral.....)
> >
> > Here are the results of the WET900 for 00:39:00 test done 10/25/02.
> > Results measured using ellipsometer, both oxide thickness and refractive
> > index are given.
> >
> > Wf pos     Center      Top         Left        Bottom      Right
> > Avr
> >
> > 1 Front    1033/1.468  1038/1.468  1033/1.469  1027/1.469  1027/1.469
> > 1032A
> > 2          1037/1.468  1040/1.468  1036/1.468  1031/1.468  1036/1.468
> > 1036A
> > 3          1049/1.468  1057/1.467  1048/1.468  1043/1.468  1059/1.467
> > 1051A
> > 4 Back     1070/1.468  1073/1.468  1066/1.468  1063/1.468  1072/1.467
> > 1069A
> >
> >
> > --
> > Nancy Latta
> > Stanford Nanofabrication Facility
> > CIS Room 145
> > 420 Via Palou Mall
> > Stanford, CA 94305-4070
> > (650) 725-6727
> > latta at snf.stanford.edu

-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



More information about the tylan2-pcs mailing list