From ychliu at snf.stanford.edu  Wed Jun  2 11:44:17 2004
From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu)
Date: Wed, 2 Jun 2004 11:44:17 -0700
Subject: Problem tylan2 2004-06-02 11:44:16: qartz wand broken
Message-ID: <mailman.137.1356283646.4932.tylan2-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Jun  2 12:34:52 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 2 Jun 2004 12:34:52 -0700
Subject: Problem tylan2 2004-06-02 11:44:16: qartz wand broken
Message-ID: <mailman.138.1356283646.4932.tylan2-pcs@snf.stanford.edu>

tip has been replaced



From latta at snf.stanford.edu  Fri Jun  4 11:44:52 2004
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 4 Jun 2004 11:44:52 -0700
Subject: Problem tylan2 2004-06-04 11:44:51: User reports non-uniform ox
Message-ID: <mailman.139.1356283646.4932.tylan2-pcs@snf.stanford.edu>

I took a look at his wafers and there are areas of nonuniformity.  I looked at the gas mixing baffle and it may be breaking through.  Not a large or obvious hole, but a strange line like a fracture.



From mdickey at snf.stanford.edu  Fri Jun  4 12:52:39 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 4 Jun 2004 12:52:39 -0700
Subject: Comment tylan2 2004-06-04 12:52:39: Baffle
Message-ID: <mailman.140.1356283646.4932.tylan2-pcs@snf.stanford.edu>

Replaced worn baffle with a new one



From gladys at snf.stanford.edu  Mon Jun  7 15:33:11 2004
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mon, 7 Jun 2004 15:33:11 -0700
Subject: Comment tylan2 2004-06-04 12:52:39: Baffle
Message-ID: <mailman.141.1356283646.4932.tylan2-pcs@snf.stanford.edu>

testrun completed, uniformity is ok



From gladys at snf.stanford.edu  Mon Jun  7 15:33:57 2004
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mon, 7 Jun 2004 15:33:57 -0700
Subject: Problem tylan2 2004-06-04 11:44:51: User reports non-uniform ox
Message-ID: <mailman.142.1356283646.4932.tylan2-pcs@snf.stanford.edu>

testrun completed, ok to use



From jhemanth at snf.stanford.edu  Thu Jun 17 19:08:03 2004
From: jhemanth at snf.stanford.edu (jhemanth at snf.stanford.edu)
Date: Thu, 17 Jun 2004 19:08:03 -0700
Subject: Problem tylan2 2004-06-17 19:08:03: Vacuum wand found on the floor.  Needs to be cleaned/replaced
Message-ID: <mailman.143.1356283646.4932.tylan2-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Fri Jun 18 07:54:20 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 18 Jun 2004 07:54:20 -0700
Subject: Problem tylan2 2004-06-17 19:08:03: Vacuum wand found on the floor.  Needs to be cleaned/replaced
Message-ID: <mailman.144.1356283646.4932.tylan2-pcs@snf.stanford.edu>

Wand tip has been replaced



From sanda at snf.stanford.edu  Sat Jun 26 14:06:50 2004
From: sanda at snf.stanford.edu (sanda at snf.stanford.edu)
Date: Sat, 26 Jun 2004 14:06:50 -0700
Subject: Problem tylan2 SNF 2004-06-26 14:06:50: mfs alarm during the process
Message-ID: <mailman.145.1356283646.4932.tylan2-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jun 28 08:25:42 2004
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Jun 2004 08:25:42 -0700
Subject: Comment tylan2 2004-04-14 07:49:00: Tube now has Trans-LC not TCA 
Message-ID: <mailman.146.1356283646.4932.tylan2-pcs@snf.stanford.edu>

noted



From seymour at snf.stanford.edu  Mon Jun 28 09:43:18 2004
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Jun 2004 09:43:18 -0700
Subject: Problem tylan2 SNF 2004-06-26 14:06:50: mfs alarm during the process
Message-ID: <mailman.147.1356283646.4932.tylan2-pcs@snf.stanford.edu>

not ionformed of which gas was the problem. Checked all zeros and did an auto zero routine on the MFS 460 controller.