From rhettb at snf.stanford.edu Tue Oct 12 14:18:41 2004 From: rhettb at snf.stanford.edu (rhettb at snf.stanford.edu) Date: Tue, 12 Oct 2004 14:18:41 -0700 Subject: Problem tylan2 SNF 2004-10-12 14:18:40: small b on central thermocouple Message-ID: The center thermocouple reads small b. It does not go away with the standard thermocouple connector wiggling. From mdickey at snf.stanford.edu Tue Oct 12 14:29:37 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 12 Oct 2004 14:29:37 -0700 Subject: Problem tylan2 SNF 2004-10-12 14:18:40: small b on central thermocouple Message-ID: tightened connections...there is no longer a problem From yeh at snf.stanford.edu Wed Oct 13 13:54:03 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Wed, 13 Oct 2004 13:54:03 -0700 Subject: Comment tylan2 SNF 2004-10-13 13:54:02: nonuniformity Message-ID: ran WET950 with wafers on middle boat. oxide is thinner on the wafer side closer to the user. can see color difference on wafers. From mdickey at snf.stanford.edu Wed Oct 13 14:48:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 13 Oct 2004 14:48:41 -0700 Subject: Comment tylan2 SNF 2004-10-13 14:48:40: Injector Message-ID: Replaced devitrified injector....should help uniformity From mdickey at snf.stanford.edu Thu Oct 14 09:52:19 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 14 Oct 2004 09:52:19 -0700 Subject: Problem tylan2 SNF 2004-10-14 09:52:17: Uniformity Message-ID: After changing the injector we need to find out the uniformity results. From fengj at snf.stanford.edu Fri Oct 15 16:53:25 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 15 Oct 2004 16:53:25 -0700 Subject: Shutdown tylan2 SNF 2004-10-15 16:53:25: TEMPL failure Message-ID: TEMPL got "B" and TEMPC got "b". Nancy tried to fix the thermal couple. The "B" disappeared but TEMPL wandered between 400 and 1000 very rapidly while the other two were around 1000. All this happened in the ramp up of WET1100. The program was aborted From tberg at snf.stanford.edu Mon Oct 18 08:17:10 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Oct 2004 08:17:10 -0700 Subject: Shutdown tylan2 SNF 2004-10-15 16:53:25: TEMPL failure Message-ID: Renmade connector for Load and reset ok now From tberg at snf.stanford.edu Mon Oct 18 08:17:41 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Oct 2004 08:17:41 -0700 Subject: Comment tylan2 SNF 2004-10-13 14:48:40: Injector Message-ID: Injector replaced From latta at snf.stanford.edu Mon Oct 18 15:20:40 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mon, 18 Oct 2004 15:20:40 -0700 Subject: Problem tylan2 SNF 2004-10-14 09:52:17: Uniformity Message-ID: Uniformity test complete Front- C1011 T1010 B1088 R1009 L1009 2- C1007 T1012 B999 R1008 L1008 3- C1007 T1011 B999 R1008 L1003 Back-C1013 T1015 B1006 R1011 L1009 Good! From latta at snf.stanford.edu Mon Oct 18 15:21:42 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Mon, 18 Oct 2004 15:21:42 -0700 Subject: Comment tylan2 SNF 2004-10-13 13:54:02: nonuniformity Message-ID: Ran test after injector replaced and TC worked on. Good! From mislam at snf.stanford.edu Sat Oct 30 09:40:53 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 30 Oct 2004 09:40:53 -0700 Subject: Problem tylan2 SNF 2004-10-30 09:40:52: TEMPL T/C shows Bad Message-ID: