Comment tylan2 SNF 2004-10-13 13:54:02: nonuniformity

yeh at snf.stanford.edu yeh at snf.stanford.edu
Wed Oct 13 13:54:03 PDT 2004


ran WET950 with wafers on middle boat.  oxide is thinner on the wafer side closer to the user.  can see color difference on wafers.




More information about the tylan2-pcs mailing list