Comment tylan2 SNF 2004-10-13 13:54:02: nonuniformity

yeh at snf.stanford.edu yeh at snf.stanford.edu
Wed Oct 13 13:54:03 PDT 2004

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ran WET950 with wafers on middle boat.  oxide is thinner on the wafer side closer to the user.  can see color difference on wafers.

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