From tberg at snf.stanford.edu Mon Apr 3 06:45:47 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 3 Apr 2006 06:45:47 -0700 Subject: Shutdown tylan2 SNF 2006-03-31 17:53:53: load zone thermocouple reading wrong Message-ID: Repaired TC connection on load zone From mdickey at snf.stanford.edu Tue Apr 11 10:17:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Apr 2006 10:17:54 -0700 Subject: Shutdown tylan2 SNF 2006-04-11 10:17:50: Cooling Message-ID: Cooling down furnace to work on Tylan 1 From mdickey at snf.stanford.edu Tue Apr 11 10:52:54 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 11 Apr 2006 10:52:54 -0700 Subject: Shutdown tylan2 SNF 2006-04-11 10:17:50: Cooling Message-ID: Ramping back up From yeh at snf.stanford.edu Thu Apr 13 01:06:00 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 13 Apr 2006 01:06:00 -0700 Subject: Comment tylan2 SNF 2006-04-13 01:06:00: Load thermal couple bad Message-ID: front boat wafers oxidized 60% faster than expected. 8% variation across 6 adjacent wafers. From yeh at snf.stanford.edu Thu Apr 13 01:06:31 2006 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 13 Apr 2006 01:06:31 -0700 Subject: Problem tylan2 SNF 2006-04-13 01:06:31: faulty Load TC Message-ID: front boat wafers oxidized 60% faster than expected. 8% variation across 6 adjacent wafers. From dejia at snf.stanford.edu Sun Apr 16 18:01:52 2006 From: dejia at snf.stanford.edu (dejia at snf.stanford.edu) Date: Sun, 16 Apr 2006 18:01:52 -0700 Subject: Comment tylan2 SNF 2006-04-16 18:01:51: vacuum wand Message-ID: The CLEAN vacuum wand is broken From mdickey at snf.stanford.edu Mon Apr 17 06:42:57 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 17 Apr 2006 06:42:57 -0700 Subject: Comment tylan2 SNF 2006-04-16 18:01:51: vacuum wand Message-ID: tip replaced From tberg at snf.stanford.edu Tue Apr 18 07:06:21 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Apr 2006 07:06:21 -0700 Subject: Problem tylan2 SNF 2006-04-13 01:06:31: faulty Load TC Message-ID: resolved From tberg at snf.stanford.edu Tue Apr 18 07:06:35 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Apr 2006 07:06:35 -0700 Subject: Comment tylan2 SNF 2006-04-13 01:06:00: Load thermal couple bad Message-ID: resolved From ratiug at snf.stanford.edu Sat Apr 22 21:27:36 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Sat, 22 Apr 2006 21:27:36 -0700 Subject: Problem tylan2 SNF 2006-04-22 21:27:36: MFC alarm Message-ID: repeated several times. From me342a at snf.stanford.edu Sun Apr 23 01:13:46 2006 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Sun, 23 Apr 2006 01:13:46 -0700 Subject: Problem tylan2 SNF 2006-04-23 01:13:45: MFS alarm Message-ID: MFS alarm. I pushed the ACK button to clear MFS alarm. From me342a at snf.stanford.edu Sun Apr 23 01:16:00 2006 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Sun, 23 Apr 2006 01:16:00 -0700 Subject: Problem tylan2 SNF 2006-04-23 01:16:00: MFS alarm again Message-ID: From seymour at snf.stanford.edu Mon Apr 24 09:01:38 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:01:38 -0700 Subject: Problem tylan2 SNF 2006-04-23 01:16:00: MFS alarm again Message-ID: Adjusted MFC zeros. From seymour at snf.stanford.edu Mon Apr 24 09:01:52 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:01:52 -0700 Subject: Problem tylan2 SNF 2006-04-23 01:13:45: MFS alarm Message-ID: noted From seymour at snf.stanford.edu Mon Apr 24 09:02:05 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 09:02:05 -0700 Subject: Problem tylan2 SNF 2006-04-22 21:27:36: MFC alarm Message-ID: From seymour at snf.stanford.edu Mon Apr 24 14:04:42 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 24 Apr 2006 14:04:42 -0700 Subject: Shutdown tylan2 SNF 2006-04-24 14:04:41: lo O2 mfc will not flow at setpoint. Message-ID: From seymour at snf.stanford.edu Tue Apr 25 08:55:07 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 Apr 2006 08:55:07 -0700 Subject: Shutdown tylan2 SNF 2006-04-24 14:04:41: lo O2 mfc will not flow at setpoint. Message-ID: I flowed loO2 and O2 at setpoint. No problems seen.