From okilic at snf.stanford.edu  Sat Feb 11 17:55:17 2006
From: okilic at snf.stanford.edu (okilic at snf.stanford.edu)
Date: Sat, 11 Feb 2006 17:55:17 -0800
Subject: Problem tylan2 SNF 2006-02-11 17:55:16: MFS alarm
Message-ID: <mailman.232.1356283646.4932.tylan2-pcs@snf.stanford.edu>

Saw MFS alarm when I came to get my wafers out. No oxide was on wafers. 
Alarm comes back after 15 secs when you press Alarm Ack. Cannot oxidize wafers.



From seymour at snf.stanford.edu  Mon Feb 13 10:05:08 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 13 Feb 2006 10:05:08 -0800
Subject: Problem tylan2 SNF 2006-02-11 17:55:16: MFS alarm
Message-ID: <mailman.233.1356283646.4932.tylan2-pcs@snf.stanford.edu>

adjusted MFS460 zero's and did auto zero routine.