Problem tylan2 SNF 2006-02-11 17:55:16: MFS alarm

okilic at okilic at
Sat Feb 11 17:55:17 PST 2006

Saw MFS alarm when I came to get my wafers out. No oxide was on wafers. 
Alarm comes back after 15 secs when you press Alarm Ack. Cannot oxidize wafers.

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