Problem tylan2 SNF 2006-01-10 15:48:06: Tylan2 thickness result

king at snf.stanford.edu king at snf.stanford.edu
Tue Jan 10 15:48:07 PST 2006


This could be a comment but I wanted people to be aware that  the 1000ANG recipe grew as much as 1275A on L-test starting material.  This was on 25 wafers loaded in the middle of the tube.  The back third not only was thicker overall, but also had thicker, nonuniform growth on their right sides,as facing the front of the tube.  It's OK for us but may affect others.




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