From bchui at snf.stanford.edu Fri Jun 2 16:44:51 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 2 Jun 2006 16:44:51 -0700 Subject: Problem tylan2 SNF 2006-06-02 16:44:50: Faster oxidation than expected Message-ID: Ran WET1000 for 9 min 40 sec, expected ~1000A, got 1250A. Bad T/C? (altho when I monitored it during the steam step, the readings looked fine.) From latta at snf.stanford.edu Tue Jun 6 11:39:24 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 6 Jun 2006 11:39:24 -0700 Subject: Shutdown tylan2 SNF 2006-06-06 11:39:24: cracked cantilever sheath- the right hand one Message-ID: Also, the door appears to need adjustment. From mdickey at snf.stanford.edu Wed Jun 7 07:13:10 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 7 Jun 2006 07:13:10 -0700 Subject: Shutdown tylan2 SNF 2006-06-06 11:39:24: cracked cantilever sheath- the right hand one Message-ID: Sheath replaced. Door adjustment appears fine From latta at snf.stanford.edu Thu Jun 8 10:39:29 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 10:39:29 -0700 Subject: Comment tylan2 SNF 2006-06-08 10:38:45: process quals- June Message-ID: over a 50 wafer spread- wafer-to-wafer = 4.4% within a wafer = 3.0% From latta at snf.stanford.edu Thu Jun 8 10:42:19 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 10:42:19 -0700 Subject: Problem tylan2 SNF 2006-06-02 16:44:50: Faster oxidation than expected Message-ID: process quals showed normal growth rate after cantilever sheath replaced. WET900, 00:39:00, F =903, B = 948. From rwoo at snf.stanford.edu Sat Jun 10 08:48:58 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 10 Jun 2006 08:48:58 -0700 Subject: Problem tylan2 SNF 2006-06-10 08:48:57: remote display blank Message-ID: From mdickey at snf.stanford.edu Mon Jun 12 06:34:52 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 12 Jun 2006 06:34:52 -0700 Subject: Problem tylan2 SNF 2006-06-10 08:48:57: remote display blank Message-ID: Corrected display problem From rwoo at snf.stanford.edu Wed Jun 14 09:05:28 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 14 Jun 2006 09:05:28 -0700 Subject: Problem tylan2 SNF 2006-06-14 09:05:27: LCD display blank again Message-ID: From rwoo at snf.stanford.edu Wed Jun 14 10:51:41 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 14 Jun 2006 10:51:41 -0700 Subject: Comment tylan2 SNF 2006-06-14 10:51:41: LCD display working now Message-ID: From latta at snf.stanford.edu Wed Jun 14 16:03:20 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Jun 2006 16:03:20 -0700 Subject: Comment tylan2 SNF 2006-06-14 10:51:41: LCD display working now Message-ID: okey dokey... From latta at snf.stanford.edu Wed Jun 14 16:04:14 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Jun 2006 16:04:14 -0700 Subject: Problem tylan2 SNF 2006-06-14 09:05:27: LCD display blank again Message-ID: Chronic design problem. Tapping on the display will bring back the readout temporariyl. From latta at snf.stanford.edu Thu Jun 22 11:34:46 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 11:34:46 -0700 Subject: Comment tylan2 SNF 2006-06-22 11:34:46: TCLCLEAN run 6/20 Message-ID: From latta at snf.stanford.edu Wed Jun 28 10:31:25 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:31:25 -0700 Subject: Comment tylan2 SNF 2006-06-22 11:34:46: TCLCLEAN run 6/20 Message-ID: From latta at snf.stanford.edu Wed Jun 28 10:31:38 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:31:38 -0700 Subject: Comment tylan2 SNF 2006-06-28 10:31:38: TLCCLEAN run Message-ID: