From latta at snf.stanford.edu Wed Nov 1 10:57:56 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 10:57:56 -0800 Subject: Problem tylan2 SNF 2006-11-01 10:57:55: Not ready to test. Source TC shows 400C. Message-ID: From seymour at snf.stanford.edu Wed Nov 1 11:29:05 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Nov 2006 11:29:05 -0800 Subject: Problem tylan2 SNF 2006-11-01 10:57:55: Not ready to test. Source TC shows 400C. Message-ID: cleaned t/c connections, all zones reading good From seymour at snf.stanford.edu Wed Nov 1 11:29:34 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Nov 2006 11:29:34 -0800 Subject: Problem tylan2 SNF 2006-10-29 22:10:10: MFS ALARM Message-ID: no alarms at this time From latta at snf.stanford.edu Wed Nov 1 16:30:37 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:30:37 -0800 Subject: Comment tylan2 SNF 2006-11-01 16:30:37: Nov Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 886A Wafer-to-wafer = 2% Within-a-wafer = 2% From latta at snf.stanford.edu Wed Nov 1 16:30:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 16:30:54 -0800 Subject: Comment tylan2 SNF 2006-10-03 17:10:31: Oct Process Quals Message-ID: to the archives From tberg at snf.stanford.edu Tue Nov 14 06:20:34 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Nov 2006 06:20:34 -0800 Subject: Problem tylan2 SNF 2006-11-14 06:20:34: Possible thickness issues Message-ID: From seymour at snf.stanford.edu Tue Nov 14 13:18:21 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 13:18:21 -0800 Subject: Problem tylan2 SNF 2006-11-14 06:20:34: Possible thickness issues Message-ID: Mike D checked T/C connections. I checked gas flows, interlocks for H2 and did backup T/C calibration. system checks good. From seymour at snf.stanford.edu Tue Nov 14 13:19:11 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 13:19:11 -0800 Subject: Comment tylan2 SNF 2006-11-14 13:19:11: check out system. needs test after repair. Message-ID: From seymour at snf.stanford.edu Tue Nov 14 15:29:44 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 15:29:44 -0800 Subject: Shutdown tylan2 SNF 2006-11-14 15:29:43: H2 Temp alarm Message-ID: From seymour at snf.stanford.edu Tue Nov 14 15:59:11 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 15:59:11 -0800 Subject: Shutdown tylan2 SNF 2006-11-14 15:29:43: H2 Temp alarm Message-ID: found slightly loose t/c contact for H2 interlock inside the MSF460 controller after checking all other connections. Back for another test. From seymour at snf.stanford.edu Tue Nov 14 15:59:51 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 15:59:51 -0800 Subject: Comment tylan2 SNF 2006-11-14 13:19:11: check out system. needs test after repair. Message-ID: test aborted due to H2 interlock fault. From seymour at snf.stanford.edu Tue Nov 14 16:00:38 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 14 Nov 2006 16:00:38 -0800 Subject: Problem tylan2 SNF 2006-11-14 16:00:37: needs test after repair and check out sys operation. Message-ID: From latta at snf.stanford.edu Tue Nov 14 16:08:59 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Nov 2006 16:08:59 -0800 Subject: Shutdown tylan2 SNF 2006-11-14 16:08:58: Needs to be tested for uniformity Message-ID: From latta at snf.stanford.edu Wed Nov 15 16:58:18 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 15 Nov 2006 16:58:18 -0800 Subject: Shutdown tylan2 SNF 2006-11-15 16:58:18: Source TC reads 500-512C Message-ID: From mdickey at snf.stanford.edu Thu Nov 16 08:38:01 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 16 Nov 2006 08:38:01 -0800 Subject: Comment tylan2 SNF 2006-11-16 08:38:01: T.C. Message-ID: Changing profile t.c. From latta at snf.stanford.edu Thu Nov 16 10:19:44 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Nov 2006 10:19:44 -0800 Subject: Problem tylan2 SNF 2006-11-14 16:00:37: needs test after repair and check out sys operation. Message-ID: Test completed, but source TC was low. Another test required after repair. From seymour at snf.stanford.edu Thu Nov 16 15:22:37 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Nov 2006 15:22:37 -0800 Subject: Shutdown tylan2 SNF 2006-11-15 16:58:18: Source TC reads 500-512C Message-ID: tube config table edited and system controllling at correct temps after profile t/c changed. tube will need a test From latta at snf.stanford.edu Thu Nov 16 16:22:27 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Nov 2006 16:22:27 -0800 Subject: Shutdown tylan2 SNF 2006-11-16 16:22:26: temp interlock during 1st dry ox step. Message-ID: From latta at snf.stanford.edu Fri Nov 17 12:05:42 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 17 Nov 2006 12:05:42 -0800 Subject: Shutdown tylan2 SNF 2006-11-17 12:05:41: temp interlock error again- drat! Message-ID: From latta at snf.stanford.edu Tue Nov 21 16:46:36 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:46:36 -0800 Subject: Comment tylan2 SNF 2006-11-01 16:30:37: Nov Process Quals Message-ID: to the archives... From latta at snf.stanford.edu Tue Nov 21 16:47:03 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:47:03 -0800 Subject: Shutdown tylan2 SNF 2006-11-14 16:08:58: Needs to be tested for uniformity Message-ID: Tested. Results in comments. Oh, they are good... From latta at snf.stanford.edu Tue Nov 21 16:47:24 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:47:24 -0800 Subject: Comment tylan2 SNF 2006-11-16 08:38:01: T.C. Message-ID: Done From latta at snf.stanford.edu Tue Nov 21 16:48:26 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:48:26 -0800 Subject: Shutdown tylan2 SNF 2006-11-16 16:22:26: temp interlock during 1st dry ox step. Message-ID: 11/11-11/21 several programs run without tripping interlock. From latta at snf.stanford.edu Tue Nov 21 16:48:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:48:54 -0800 Subject: Shutdown tylan2 SNF 2006-11-17 12:05:41: temp interlock error again- drat! Message-ID: Tested after repair. Good. Details in comments From latta at snf.stanford.edu Tue Nov 21 16:50:55 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 21 Nov 2006 16:50:55 -0800 Subject: Comment tylan2 SNF 2006-11-21 16:50:53: Qual after TC profile calibration Message-ID: and connector repair. 50 Wafer spread WET900 00:39:00 Average all wafers = 994A Wafer-to-wafer = 2.4% Within-a-wafer = 1.4%