From latta at snf.stanford.edu  Tue Oct  3 17:10:32 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 17:10:32 -0700
Subject: Comment tylan2 SNF 2006-10-03 17:10:31: Oct Process Quals
Message-ID: <mailman.320.1356283647.4932.tylan2-pcs@snf.stanford.edu>

WET900   00:39:00
Average all wafers = 1002A
Wafer-to-wafer = 1.7%
Within-a-wafer = 1.1%



From mdickey at snf.stanford.edu  Tue Oct 17 11:04:32 2006
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 17 Oct 2006 11:04:32 -0700
Subject: Comment tylan2 SNF 2006-10-17 11:04:32: MFC
Message-ID: <mailman.321.1356283647.4932.tylan2-pcs@snf.stanford.edu>

Replaced O2 MFC



From tberg at snf.stanford.edu  Thu Oct 19 08:13:55 2006
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 19 Oct 2006 08:13:55 -0700
Subject: Comment tylan2 SNF 2006-10-17 11:04:32: MFC
Message-ID: <mailman.322.1356283647.4932.tylan2-pcs@snf.stanford.edu>

noted



From latta at snf.stanford.edu  Thu Oct 26 10:23:55 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 26 Oct 2006 10:23:55 -0700
Subject: Comment tylan2 SNF 2006-09-01 16:26:44: Sept Process Quals
Message-ID: <mailman.323.1356283647.4932.tylan2-pcs@snf.stanford.edu>

to the archives...



From fengj at snf.stanford.edu  Sun Oct 29 22:10:10 2006
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Sun, 29 Oct 2006 22:10:10 -0800
Subject: Problem tylan2 SNF 2006-10-29 22:10:10: MFS ALARM
Message-ID: <mailman.324.1356283647.4932.tylan2-pcs@snf.stanford.edu>

Ran WET1100 for 38 min. The H2/O2 reading is zero.  The thickness of the oxide came out way smaller than it should be.