From latta at snf.stanford.edu Wed Aug 1 16:02:28 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Aug 2007 16:02:28 -0700 Subject: Comment tylan2 SNF 2007-07-13 16:40:13: July Process Quals, part. 3 Message-ID: To the archives! From latta at snf.stanford.edu Wed Aug 1 16:04:44 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Aug 2007 16:04:44 -0700 Subject: Comment tylan2 SNF 2007-08-01 16:04:44: Aug Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 978A Within-a-wafer = 1.2% Wafer-to-wafer = 3.2% From nevran at snf.stanford.edu Sun Aug 5 12:36:31 2007 From: nevran at snf.stanford.edu (nevran at snf.stanford.edu) Date: Sun, 5 Aug 2007 12:36:31 -0700 Subject: Shutdown tylan2 SNF 2007-08-05 12:36:30: Tube not closing all the way Message-ID: Seems to have a mechanical problem. From mdickey at snf.stanford.edu Tue Aug 7 14:04:22 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 7 Aug 2007 14:04:22 -0700 Subject: Comment tylan2 SNF 2007-08-07 14:04:21: Test needed Message-ID: Replaced element and tube. No more scrapeing!!!!!!! System will need a test and need to make sure temp stabilizes properly. Test probably will be done tomorrow From latta at snf.stanford.edu Wed Aug 8 14:31:01 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:31:01 -0700 Subject: Comment tylan2 SNF 2007-08-01 16:04:44: Aug Process Quals Message-ID: New quals- see comments. From latta at snf.stanford.edu Wed Aug 8 14:31:29 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:31:29 -0700 Subject: Shutdown tylan2 SNF 2007-08-05 12:36:30: Tube not closing all the way Message-ID: New tube and element installed. From latta at snf.stanford.edu Wed Aug 8 14:31:47 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:31:47 -0700 Subject: Comment tylan2 SNF 2007-08-07 14:04:21: Test needed Message-ID: Tested- see comments. From latta at snf.stanford.edu Wed Aug 8 14:35:21 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:35:21 -0700 Subject: Comment tylan2 SNF 2007-08-08 14:35:20: Process Quals after tube & elemnet change Message-ID: WET900 00:39:00 50 wafer spread Average all wafer = 1009A Within-a-wafer = 3.5% Wafer-to-wafer = 3.6% Avr is good, but w-to-w and within-a-wafer are within spec, but a little higher than we'd like to see But what a pretty clean tube this one is! From fengj at snf.stanford.edu Mon Aug 13 19:53:08 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Mon, 13 Aug 2007 19:53:08 -0700 Subject: Problem tylan2 SNF 2007-08-13 19:53:08: non-uniformity Message-ID: I just did WET900 for 9 min with 9 wafers. The wafers were put closely together. The wafer closest to the Load side came out with 349 A oxide, the one in the middle 337 A, and the one closest to the source side 319 A. The variation is ~ 5 %. The thicknesses were measured by the ellipsometer. From yuhykr at snf.stanford.edu Mon Aug 27 22:46:34 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Mon, 27 Aug 2007 22:46:34 -0700 Subject: Problem tylan2 SNF 2007-08-27 22:46:34: H2 flow is half of set up point Message-ID: From mtang at snf.stanford.edu Tue Aug 28 09:16:09 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 28 Aug 2007 09:16:09 -0700 Subject: Problem tylan2 SNF 2007-08-28 09:16:08: H2 flows questionable Message-ID: Use for dry ox and anneals until resolved. From mdickey at snf.stanford.edu Wed Aug 29 13:36:54 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Aug 2007 13:36:54 -0700 Subject: Shutdown tylan2 SNF 2007-08-29 13:36:54: Interlock Message-ID: Down for H2/`O2 interlock problem