Problem tylan2 SNF 2007-08-13 19:53:08: non-uniformity

fengj at snf.stanford.edu fengj at snf.stanford.edu
Mon Aug 13 19:53:08 PDT 2007


I just did WET900 for 9 min with 9 wafers. The wafers were put closely together. The wafer closest to the Load side came out with 349 A oxide, the one in the middle 337 A, and the one closest to the source side 319 A. The variation is ~ 5 %. The thicknesses were measured by the ellipsometer.




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