From seymour at snf.stanford.edu  Tue Dec  4 11:26:11 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 4 Dec 2007 11:26:11 -0800
Subject: Shutdown tylan2 SNF 2007-12-04 11:26:11: mixing chamber has hole and a crack
Message-ID: <mailman.496.1356283649.4932.tylan2-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Tue Dec  4 12:18:50 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 4 Dec 2007 12:18:50 -0800
Subject: Shutdown tylan2 SNF 2007-12-04 11:26:11: mixing chamber has hole and a crack
Message-ID: <mailman.497.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Chamber has been replaced by the speedy speedy crew



From latta at snf.stanford.edu  Tue Dec  4 17:10:50 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 Dec 2007 17:10:50 -0800
Subject: Comment tylan2 SNF 2007-12-04 17:10:50: Dec Process Quals
Message-ID: <mailman.498.1356283649.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 1060A  (expect about 1000A)
Within-a-wafer = 1.0%  (expect less than 5%)
Wafer-to-wafer = 2.7% (expect less than 5%)



From latta at snf.stanford.edu  Tue Dec  4 17:11:03 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 Dec 2007 17:11:03 -0800
Subject: Comment tylan2 SNF 2007-11-02 09:50:12: Nov Process Quals
Message-ID: <mailman.499.1356283649.4932.tylan2-pcs@snf.stanford.edu>

to the archives



From seymour at snf.stanford.edu  Thu Dec 13 10:10:29 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 13 Dec 2007 10:10:29 -0800
Subject: Comment tylan2 SNF 2007-12-13 10:10:29: thickness across front wafers
Message-ID: <mailman.500.1356283649.4932.tylan2-pcs@snf.stanford.edu>

I adjusted door alignment slightly  
and checked for proper holding pressure on door plate when door closed. Need to have feed back on front wafer uniformity issues to verify closure on this issue.



From rshyam at snf.stanford.edu  Fri Dec 14 03:22:20 2007
From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu)
Date: Fri, 14 Dec 2007 03:22:20 -0800
Subject: Problem tylan2 SNF 2007-12-14 03:22:20: screeching sound
Message-ID: <mailman.501.1356283649.4932.tylan2-pcs@snf.stanford.edu>

makes a screeching sound when the tube goes in...



From mdickey at snf.stanford.edu  Fri Dec 14 09:47:17 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Fri, 14 Dec 2007 09:47:17 -0800
Subject: Problem tylan2 SNF 2007-12-14 03:22:20: screeching sound
Message-ID: <mailman.502.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Made a cantilever adjustment. scraping has subsided. There
is very little tolerance for adjustment.