From latta at snf.stanford.edu Thu Jul 5 16:21:51 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:21:51 -0700 Subject: Comment tylan2 SNF 2007-06-01 17:11:31: June Process Quals Message-ID: to the archives... From latta at snf.stanford.edu Thu Jul 5 16:23:52 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:23:52 -0700 Subject: Comment tylan2 SNF 2007-07-05 16:23:52: July process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1018A Wafer-to-wafer = 6.0% Within-a-wafer = 1.7% Wafer to wafer is a bit high and may need some looking into. From latta at snf.stanford.edu Tue Jul 10 17:11:47 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 10 Jul 2007 17:11:47 -0700 Subject: Comment tylan2 SNF 2007-07-05 16:23:52: July process quals Message-ID: Process quals run again. From latta at snf.stanford.edu Tue Jul 10 17:15:43 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 10 Jul 2007 17:15:43 -0700 Subject: Comment tylan2 SNF 2007-07-10 17:15:42: Process re-qual July Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1036A Within-a-wafer = 3.4% Wafer-to-wafer = 5.2% Slight improvement in W-to-W, but much worse within-a-wafer. This may be because of a candtilever adjustment made while wafers were on boats causing particles (oppps). The particles left observable non-uniformities on all wafers. Asked for data from next users run. From mtang at snf.stanford.edu Wed Jul 11 09:16:14 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 Jul 2007 09:16:14 -0700 Subject: Problem tylan2 SNF 2007-07-11 09:16:14: Process re-qual July Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1036A Within-a-wafer = 3.4% Wafer-to-wafer = 5.2% Slight improvement in W-to-W, but much worse within-a-wafer. This may be because of a candtilever adjustment made while wafers were on boats causing particles (oppps). The particles left observable non-uniformities on all wafers. Asked for data from next users run. From latta at snf.stanford.edu Fri Jul 13 16:37:51 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 13 Jul 2007 16:37:51 -0700 Subject: Problem tylan2 SNF 2007-07-11 09:16:14: Process re-qual July Message-ID: New qual test- see comments From latta at snf.stanford.edu Fri Jul 13 16:38:09 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 13 Jul 2007 16:38:09 -0700 Subject: Comment tylan2 SNF 2007-07-10 17:15:42: Process re-qual July Message-ID: new test posted From latta at snf.stanford.edu Fri Jul 13 16:40:14 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 13 Jul 2007 16:40:14 -0700 Subject: Comment tylan2 SNF 2007-07-13 16:40:13: July Process Quals, part. 3 Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 966A Within-a-wafer = 1.2% Wafer-to-wafer = 3.8% From maurice at snf.stanford.edu Mon Jul 16 17:23:27 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Jul 2007 17:23:27 -0700 Subject: Shutdown tylan2 SNF 2007-07-16 17:23:27: Broken quartz Message-ID: The quartz piece that sits on the load end of the cantilever scrapped the bottom of the tube an broke. I moved it toward the middle of tube so I could close the door. From mdickey at snf.stanford.edu Tue Jul 17 07:35:02 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 17 Jul 2007 07:35:02 -0700 Subject: Shutdown tylan2 SNF 2007-07-16 17:23:27: Broken quartz Message-ID: Replaced broken mixing chamber baffle