From latta at snf.stanford.edu Tue May 1 17:48:05 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 May 2007 17:48:05 -0700 Subject: Comment tylan2 SNF 2007-05-01 17:48:05: May process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 999 Within-a-wafer = 0.9% Wafer-to-wafer = 3.6% From qwang at snf.stanford.edu Thu May 17 15:47:27 2007 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Thu, 17 May 2007 15:47:27 -0700 Subject: Shutdown tylan2 SNF 2007-05-17 15:47:27: crack found on the tube Message-ID: and furnace shut down From mdickey at snf.stanford.edu Fri May 18 10:41:27 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 May 2007 10:41:27 -0700 Subject: Comment tylan2 SNF 2007-05-18 10:41:26: Test needed Message-ID: Tube has been replaced. Will need test when temp stabilizes From shott at snf.stanford.edu Sat May 19 08:25:13 2007 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 May 2007 08:25:13 -0700 Subject: Shutdown tylan2 SNF 2007-05-19 08:25:13: Needs restart after power failure ... Message-ID: From maurice at snf.stanford.edu Mon May 21 18:10:13 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2007 18:10:13 -0700 Subject: Comment tylan2 SNF 2007-05-21 18:10:13: testing Message-ID: Will read wafer in the morning From king at snf.stanford.edu Mon May 21 22:42:12 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 21 May 2007 22:42:12 -0700 Subject: Problem tylan2 SNF 2007-05-21 22:42:11: No oxidation Message-ID: Unloaded Maurice's WET900 test run and there was no visible oxidation (didn't measure it). From mdickey at snf.stanford.edu Tue May 22 09:02:44 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 22 May 2007 09:02:44 -0700 Subject: Comment tylan2 SNF 2007-05-22 09:02:43: Test Message-ID: Needs test after control valve adjustment From seymour at snf.stanford.edu Tue May 22 10:23:44 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 10:23:44 -0700 Subject: Shutdown tylan2 SNF 2007-05-17 15:47:27: crack found on the tube Message-ID: tube replaced From seymour at snf.stanford.edu Tue May 22 10:24:56 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 10:24:56 -0700 Subject: Shutdown tylan2 SNF 2007-05-19 08:25:13: Needs restart after power failure ... Message-ID: tlcclean bing started after mfc for H2 adjusted to co0ntron at seetpoint From seymour at snf.stanford.edu Tue May 22 15:37:55 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 22 May 2007 15:37:55 -0700 Subject: Shutdown tylan2 SNF 2007-05-22 15:37:54: running t/c cal Message-ID: center zone profile t/c had loose wire causing temp errors From seymour at snf.stanford.edu Wed May 23 07:39:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 07:39:21 -0700 Subject: Shutdown tylan2 SNF 2007-05-22 15:37:54: running t/c cal Message-ID: Center zone temp erratic. Found loose profile t/c connection. started and completed backup t/c calibration. From seymour at snf.stanford.edu Wed May 23 07:40:44 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 07:40:44 -0700 Subject: Problem tylan2 SNF 2007-05-23 07:40:43: running wet800 for a test Message-ID: From seymour at snf.stanford.edu Wed May 23 08:20:44 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 08:20:44 -0700 Subject: Problem tylan2 SNF 2007-05-23 07:40:43: running wet800 for a test Message-ID: wet800 ran with no faults or alarms. Needs thickness test. From seymour at snf.stanford.edu Wed May 23 08:22:27 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 08:22:27 -0700 Subject: Problem tylan2 SNF 2007-05-21 22:42:11: No oxidation Message-ID: H2 was having diffulculty controlling to setpoint. Adjusted max flow and checked zero flow tyested and flow to setpoint of 1500 sccm as per recipe. From seymour at snf.stanford.edu Wed May 23 08:22:59 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 08:22:59 -0700 Subject: Comment tylan2 SNF 2007-05-18 10:41:26: Test needed Message-ID: tested after tube change From seymour at snf.stanford.edu Wed May 23 08:24:24 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 08:24:24 -0700 Subject: Comment tylan2 SNF 2007-05-22 09:02:43: Test Message-ID: i am writting the tube up for a test after t/c calibration From seymour at snf.stanford.edu Wed May 23 08:24:56 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 23 May 2007 08:24:56 -0700 Subject: Problem tylan2 SNF 2007-05-23 08:24:56: needs test after t/c calibration Message-ID: From latta at snf.stanford.edu Wed May 23 16:45:54 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 23 May 2007 16:45:54 -0700 Subject: Comment tylan2 SNF 2007-05-21 18:10:13: testing Message-ID: turned out bad. From latta at snf.stanford.edu Wed May 23 16:46:13 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 23 May 2007 16:46:13 -0700 Subject: Problem tylan2 SNF 2007-05-23 08:24:56: needs test after t/c calibration Message-ID: test completed. See comments. From latta at snf.stanford.edu Wed May 23 16:48:29 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 23 May 2007 16:48:29 -0700 Subject: Comment tylan2 SNF 2007-05-23 16:48:29: Test after TC calibration and repair. Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1029A Within-a-wafer = 0.4% Wafer-to-wafer = 1.8% From rshyam at snf.stanford.edu Tue May 29 13:05:51 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 29 May 2007 13:05:51 -0700 Subject: Comment tylan2 SNF 2007-05-29 13:05:51: Quartz wand broken Message-ID: From maurice at snf.stanford.edu Tue May 29 13:51:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 May 2007 13:51:37 -0700 Subject: Comment tylan2 SNF 2007-05-29 13:05:51: Quartz wand broken Message-ID: wands replaced