Problem tylan2 SNF 2007-05-21 22:42:11: No oxidation

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed May 23 08:22:27 PDT 2007

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H2 was having diffulculty controlling to setpoint. Adjusted max flow and checked zero flow tyested and flow to setpoint of 1500 sccm as per recipe.

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