From latta at snf.stanford.edu Fri Nov 2 09:50:12 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:50:12 -0700 Subject: Comment tylan2 SNF 2007-11-02 09:50:12: Nov Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 989A (expect about 1000A) Within-a-wafer = 0.6% (expect less than 5%) Wafer-to-wafer = 1.3% (expect less than 5%) From latta at snf.stanford.edu Fri Nov 2 09:50:29 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:50:29 -0700 Subject: Comment tylan2 SNF 2007-10-03 17:40:16: Oct process quals- good Message-ID: to the archives... From rissman at snf.stanford.edu Tue Nov 13 09:24:14 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:24:14 -0800 Subject: Problem tylan2 SNF 2007-10-27 19:02:45: load end temp still lags Message-ID: Ray with help from Ted and and Tystar the tube now reaches within 5,5 degrees of 850 in all zones at the start of step 20. Nancy suggests increasing the time in step 15 in recipes below 90 to give time to reach temp. From rissman at snf.stanford.edu Tue Nov 13 09:24:36 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:24:36 -0800 Subject: Comment tylan2 SNF 2007-10-31 13:56:33: temp doing better Message-ID: Ray with help from Ted and and Tystar the tube now reaches within 5,5 degrees of 850 in all zones at the start of step 20. Nancy suggests increasing the time in step 15 in recipes below 90 to give time to reach temp.