Comment tylan2 SNF 2007-11-02 09:50:12: Nov Process Quals

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Nov 2 09:50:12 PDT 2007


WET900  00:39:00  50 wafer spread
Average all wafers = 989A  (expect about 1000A)
Within-a-wafer = 0.6%  (expect less than 5%)
Wafer-to-wafer = 1.3% (expect less than 5%)




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