Comment tylan2 SNF 2007-10-03 17:40:16: Oct process quals- good

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Oct 3 17:40:16 PDT 2007


WET900  00:39:00  50 wafer spread
Average all wafers = 973A  (expect about 1000A)
Within-a-wafer = 0.5%  (expect less than 5%)
Wafer-to-wafer = 0.8% (expect less than 5%)




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