From seymour at snf.stanford.edu  Tue Sep  4 13:06:41 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 4 Sep 2007 13:06:41 -0700
Subject: Problem tylan2 SNF 2007-08-27 22:46:34: H2 flow is half of set up point
Message-ID: <mailman.472.1356283649.4932.tylan2-pcs@snf.stanford.edu>

H2 flow is normal now



From seymour at snf.stanford.edu  Tue Sep  4 13:07:08 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 4 Sep 2007 13:07:08 -0700
Subject: Problem tylan2 SNF 2007-08-28 09:16:08: H2 flows questionable
Message-ID: <mailman.473.1356283649.4932.tylan2-pcs@snf.stanford.edu>

H2 flow questions have been addressed



From seymour at snf.stanford.edu  Tue Sep  4 13:07:53 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 4 Sep 2007 13:07:53 -0700
Subject: Shutdown tylan2 SNF 2007-08-29 13:36:54: Interlock
Message-ID: <mailman.474.1356283649.4932.tylan2-pcs@snf.stanford.edu>

H2 interlock problem has been repaired.



From seymour at snf.stanford.edu  Tue Sep  4 13:09:10 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 4 Sep 2007 13:09:10 -0700
Subject: Shutdown tylan2 SNF 2007-09-04 13:09:09: H2 flow has been repaired
Message-ID: <mailman.475.1356283649.4932.tylan2-pcs@snf.stanford.edu>

system has been checked and tested by myself but needs test by process before release.



From maurice at snf.stanford.edu  Tue Sep  4 17:09:33 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 4 Sep 2007 17:09:33 -0700
Subject: Shutdown tylan2 SNF 2007-09-04 13:09:09: H2 flow has been repaired
Message-ID: <mailman.476.1356283649.4932.tylan2-pcs@snf.stanford.edu>

User is running a dry test



From maurice at snf.stanford.edu  Tue Sep  4 17:10:13 2007
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 4 Sep 2007 17:10:13 -0700
Subject: Problem tylan2 SNF 2007-09-04 17:10:12: Needs process test
Message-ID: <mailman.477.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Tube has not been checked out by process. 



From latta at snf.stanford.edu  Wed Sep  5 14:33:51 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 5 Sep 2007 14:33:51 -0700
Subject: Problem tylan2 SNF 2007-08-13 19:53:08: non-uniformity
Message-ID: <mailman.478.1356283649.4932.tylan2-pcs@snf.stanford.edu>

H2 problem beaten into submission....



From latta at snf.stanford.edu  Wed Sep  5 14:34:48 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 5 Sep 2007 14:34:48 -0700
Subject: Problem tylan2 SNF 2007-09-04 17:10:12: Needs process test
Message-ID: <mailman.479.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Test run.  Now, *this* is a furnace.  Results posted in comments



From latta at snf.stanford.edu  Wed Sep  5 14:35:18 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 5 Sep 2007 14:35:18 -0700
Subject: Comment tylan2 SNF 2007-08-08 14:35:20: Process Quals after tube & elemnet change
Message-ID: <mailman.480.1356283649.4932.tylan2-pcs@snf.stanford.edu>

New test run.



From latta at snf.stanford.edu  Wed Sep  5 14:37:14 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 5 Sep 2007 14:37:14 -0700
Subject: Comment tylan2 SNF 2007-09-05 14:37:13: Sept Process Quals- after H2 repair
Message-ID: <mailman.481.1356283649.4932.tylan2-pcs@snf.stanford.edu>

WET900  0:39:00  50 wafer spread
Average all wafers = 978A
Within-a-wafer = 0.49%
Wafer-to-wafer = 0.73%