Comment tylan2 SNF 2007-09-05 14:37:13: Sept Process Quals- after H2 repair

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 5 14:37:14 PDT 2007


WET900  0:39:00  50 wafer spread
Average all wafers = 978A
Within-a-wafer = 0.49%
Wafer-to-wafer = 0.73%




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