Comment tylan2 SNF 2007-09-05 14:37:13: Sept Process Quals- after H2 repair
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Sep 5 14:37:14 PDT 2007
WET900 0:39:00 50 wafer spread
Average all wafers = 978A
Within-a-wafer = 0.49%
Wafer-to-wafer = 0.73%
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