From tberg at snf.stanford.edu Fri Dec 5 06:08:26 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Dec 2008 06:08:26 -0800 Subject: Comment tylan2 SNF 2008-11-24 10:44:27: checked loader operation Message-ID: ran the loader in and out a number of times using WET800 recipe and operation was normal. Loader went all the way in and did a high torque push after reaching first position sensor. o further issues From tberg at snf.stanford.edu Fri Dec 5 06:08:48 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 5 Dec 2008 06:08:48 -0800 Subject: Problem tylan2 SNF 2008-11-23 15:54:39: Door Closure Message-ID: ran the loader in and out a number of times using WET800 recipe and operation was normal. Loader went all the way in and did a high torque push after reaching first position sensor. No further issues From latta at snf.stanford.edu Fri Dec 12 11:25:35 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 12 Dec 2008 11:25:35 -0800 Subject: Problem tylan2 SNF 2008-12-12 11:25:34: Temp shows Big B's on C & S Message-ID: Reading seems to be ok. I noticed this during the quals run yesterday. I tried to re-seat the tc connectors, but that just made the reading go to 400C. From seymour at snf.stanford.edu Fri Dec 12 11:44:54 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 12 Dec 2008 11:44:54 -0800 Subject: Problem tylan2 SNF 2008-12-12 11:25:34: Temp shows Big B's on C & S Message-ID: checked t/c connections and reset the tcu. checked status on tycoom and all zones reading temp ok with no "B's". From latta at snf.stanford.edu Fri Dec 12 14:34:48 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:34:48 -0800 Subject: Comment tylan2 SNF 2008-12-12 14:34:48: Dec quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1284A (expect about 1000A) Within-a-wafer = 1.35% (expect less than 5%) Wafer-to-wafer = 11.35% (expect less than 5%) NOTE: this is out of spec- the thickness is higher than expected and the wafer-to-wafer uniformity is quite bad. We will re-qual soon. From latta at snf.stanford.edu Fri Dec 12 14:35:11 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:35:11 -0800 Subject: Comment tylan2 SNF 2008-11-20 16:11:04: Qual after door adjustment Message-ID: archived From latta at snf.stanford.edu Fri Dec 12 14:35:28 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:35:28 -0800 Subject: Comment tylan2 SNF 2008-11-23 15:53:59: TLC Clean 11/23/08 Message-ID: noted From rshyam at snf.stanford.edu Sun Dec 14 23:59:58 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 14 Dec 2008 23:59:58 -0800 Subject: Problem tylan2 SNF 2008-12-14 23:59:58: MFS Alarm Message-ID: O2 Hi leak From seymour at snf.stanford.edu Mon Dec 15 13:52:37 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 15 Dec 2008 13:52:37 -0800 Subject: Comment tylan2 SNF 2008-12-15 13:52:37: loader door seemed to be at slight angle Message-ID: Ted adjusted door angle