Comment tylan2 SNF 2008-12-12 14:34:48: Dec quals

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Dec 12 14:34:48 PST 2008


WET900  00:39:00  50 wafer spread
Average all wafers = 1284A  (expect about 1000A)
Within-a-wafer = 1.35%  (expect less than 5%)
Wafer-to-wafer = 11.35% (expect less than 5%)
NOTE: this is out of spec- the thickness is higher than expected and the wafer-to-wafer uniformity is quite bad.  We will re-qual soon.




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