From latta at snf.stanford.edu  Wed Feb 13 15:58:09 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 13 Feb 2008 15:58:09 -0800
Subject: Comment tylan2 SNF 2008-01-29 08:25:18: flowing O2 and H2
Message-ID: <mailman.514.1356283649.4932.tylan2-pcs@snf.stanford.edu>

noted



From latta at snf.stanford.edu  Wed Feb 13 15:59:03 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 13 Feb 2008 15:59:03 -0800
Subject: Comment tylan2 SNF 2008-02-13 15:59:03: Feb process quals
Message-ID: <mailman.515.1356283649.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 1008A  (expect about 1000A)
Within-a-wafer = 0.6%  (expect less than 5%)
Wafer-to-wafer = 1.3% (expect less than 5%)



From latta at snf.stanford.edu  Wed Feb 13 15:59:16 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 13 Feb 2008 15:59:16 -0800
Subject: Comment tylan2 SNF 2008-01-03 17:41:13: Jan process quals
Message-ID: <mailman.516.1356283649.4932.tylan2-pcs@snf.stanford.edu>

new quals posted