From latta at snf.stanford.edu  Thu Jan  3 17:40:03 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Jan 2008 17:40:03 -0800
Subject: Comment tylan2 SNF 2007-12-13 10:10:29: thickness across front wafers
Message-ID: <mailman.503.1356283649.4932.tylan2-pcs@snf.stanford.edu>

tested good.



From latta at snf.stanford.edu  Thu Jan  3 17:41:13 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Jan 2008 17:41:13 -0800
Subject: Comment tylan2 SNF 2008-01-03 17:41:13: Jan process quals
Message-ID: <mailman.504.1356283649.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 1080A  (expect about 1000A)
Within-a-wafer = 0.7%  (expect less than 5%)
Wafer-to-wafer = 1.4% (expect less than 5%)



From latta at snf.stanford.edu  Thu Jan  3 17:41:18 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Jan 2008 17:41:18 -0800
Subject: Comment tylan2 SNF 2007-12-04 17:10:50: Dec Process Quals
Message-ID: <mailman.505.1356283649.4932.tylan2-pcs@snf.stanford.edu>




From rostam at snf.stanford.edu  Mon Jan 14 17:16:45 2008
From: rostam at snf.stanford.edu (rostam at snf.stanford.edu)
Date: Mon, 14 Jan 2008 17:16:45 -0800
Subject: Problem tylan2 SNF 2008-01-14 17:16:43: temperature low
Message-ID: <mailman.506.1356283649.4932.tylan2-pcs@snf.stanford.edu>

i ran dry900. at step 20 (oxidation), temperature was around 840C.



From mdickey at snf.stanford.edu  Tue Jan 15 06:22:20 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 15 Jan 2008 06:22:20 -0800
Subject: Shutdown tylan2 SNF 2008-01-15 06:22:20: broekn lead
Message-ID: <mailman.507.1356283649.4932.tylan2-pcs@snf.stanford.edu>

One of the lead wires to the element is broken and needs
to be reconnected



From mdickey at snf.stanford.edu  Tue Jan 15 07:21:50 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 15 Jan 2008 07:21:50 -0800
Subject: Shutdown tylan2 SNF 2008-01-15 06:22:20: broekn lead
Message-ID: <mailman.508.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Fixed broken connection. Temp has stabilized now.



From mdickey at snf.stanford.edu  Tue Jan 15 07:22:32 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 15 Jan 2008 07:22:32 -0800
Subject: Problem tylan2 SNF 2008-01-14 17:16:43: temperature low
Message-ID: <mailman.509.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Brokrn lead wire on element. It has been fixed.



From mdickey at snf.stanford.edu  Tue Jan 15 07:22:54 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 15 Jan 2008 07:22:54 -0800
Subject: Shutdown tylan2 SNF 2008-01-15 06:22:20: broekn lead
Message-ID: <mailman.510.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Fixed broken connection. Temp has stabilized



From nppatil at snf.stanford.edu  Mon Jan 28 23:30:21 2008
From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu)
Date: Mon, 28 Jan 2008 23:30:21 -0800
Subject: Problem tylan2 SNF 2008-01-28 23:30:20: MFS alarm
Message-ID: <mailman.511.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Tube was alarming during rampdown. 
Gas panel at back indicated O2HI leak.



From seymour at snf.stanford.edu  Tue Jan 29 08:25:19 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 29 Jan 2008 08:25:19 -0800
Subject: Comment tylan2 SNF 2008-01-29 08:25:18: flowing O2 and H2
Message-ID: <mailman.512.1356283649.4932.tylan2-pcs@snf.stanford.edu>

the O2 and H2 flows are steady while testing continues.



From seymour at snf.stanford.edu  Wed Jan 30 08:39:19 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 30 Jan 2008 08:39:19 -0800
Subject: Problem tylan2 SNF 2008-01-28 23:30:20: MFS alarm
Message-ID: <mailman.513.1356283649.4932.tylan2-pcs@snf.stanford.edu>

I flowed H2/O2 and monitored flow the reading for deviations to setpoint and found no control issues. H2 followed O2 setpoint at the set ratio. I was unable to duplicate problem