From seymour at snf.stanford.edu Thu Jun 5 08:36:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 5 Jun 2008 08:36:15 -0700 Subject: Comment tylan2 SNF 2008-06-05 08:36:14: checked TRANSLC and torch Message-ID: both were ok. From quickwin at snf.stanford.edu Fri Jun 6 16:20:38 2008 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Fri, 6 Jun 2008 16:20:38 -0700 Subject: Problem tylan2 SNF 2008-06-06 16:20:38: rate way off Message-ID: I did wet1000 to grow 23804A oxide in 21 hour. Result is 18500A. Difference is 5300A. Is the temperature too low or something? From latta at snf.stanford.edu Wed Jun 18 14:43:59 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:43:59 -0700 Subject: Comment tylan2 SNF 2008-06-18 14:43:54: June Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 999A (expect about 1000A) Within-a-wafer = 1.4% (expect less than 5%) Wafer-to-wafer = 2.4% (expect less than 5%) From latta at snf.stanford.edu Wed Jun 18 14:44:15 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:44:15 -0700 Subject: Comment tylan2 SNF 2008-05-06 16:28:47: May process quals Message-ID: new quals posted From latta at snf.stanford.edu Wed Jun 18 14:44:33 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 18 Jun 2008 14:44:33 -0700 Subject: Comment tylan2 SNF 2008-06-05 08:36:14: checked TRANSLC and torch Message-ID: noted From tberg at snf.stanford.edu Mon Jun 23 06:23:31 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Jun 2008 06:23:31 -0700 Subject: Problem tylan2 SNF 2008-06-06 16:20:38: rate way off Message-ID: test was good