From jhpark9 at snf.stanford.edu Mon Mar 3 16:07:59 2008 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 3 Mar 2008 16:07:59 -0800 Subject: Problem tylan2 SNF 2008-03-03 16:07:59: Probelm : Boat in and out Message-ID: The boat doesn't automatically come in and out. I am using it manually. From latta at snf.stanford.edu Fri Mar 7 09:19:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:19:24 -0800 Subject: Problem tylan2 SNF 2008-03-03 16:07:59: Probelm : Boat in and out Message-ID: For now the boat in and out must be done manually. New message posted in problems. From latta at snf.stanford.edu Fri Mar 7 09:20:41 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:20:41 -0800 Subject: Problem tylan2 SNF 2008-03-07 09:20:40: Auto boat loader not working Message-ID: Please use boat in and out buttons to manually pull and push the boat assembly. This problem is being worked on by Ted and Ray. From latta at snf.stanford.edu Tue Mar 11 16:22:01 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Mar 2008 16:22:01 -0700 Subject: Comment tylan2 SNF 2008-03-11 16:22:01: Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1014A (expect about 1000A) Within-a-wafer = 0.8% (expect less than 5%) Wafer-to-wafer = 1.3% (expect less than 5%) From latta at snf.stanford.edu Tue Mar 11 16:22:38 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Mar 2008 16:22:38 -0700 Subject: Comment tylan2 SNF 2008-03-11 16:22:37: Mar process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1014A (expect about 1000A) Within-a-wafer = 0.8% (expect less than 5%) Wafer-to-wafer = 1.3% (expect less than 5%) From latta at snf.stanford.edu Tue Mar 11 16:22:53 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Mar 2008 16:22:53 -0700 Subject: Comment tylan2 SNF 2008-03-11 16:22:01: Message-ID: forgot subject line... From latta at snf.stanford.edu Tue Mar 11 16:23:04 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 11 Mar 2008 16:23:04 -0700 Subject: Comment tylan2 SNF 2008-02-13 15:59:03: Feb process quals Message-ID: logged From tberg at snf.stanford.edu Wed Mar 12 12:36:41 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Mar 2008 12:36:41 -0700 Subject: Problem tylan2 SNF 2008-03-07 09:20:40: Auto boat loader not working Message-ID: Repaired connection from Slave Cpu to boat loader. Tested several times in Auto no problem From maurice at snf.stanford.edu Mon Mar 17 11:38:15 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Mar 2008 11:38:15 -0700 Subject: Problem tylan2 SNF 2008-03-17 11:38:14: MFS alarm Message-ID: O2 interlock From seymour at snf.stanford.edu Mon Mar 17 13:47:42 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Mar 2008 13:47:42 -0700 Subject: Problem tylan2 SNF 2008-03-17 11:38:14: MFS alarm Message-ID: O2 MFC zero was off causing system to think there was a leak. I adjusted the zero and restarted the run. From king at snf.stanford.edu Tue Mar 18 21:17:25 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 18 Mar 2008 21:17:25 -0700 Subject: Problem tylan2 SNF 2008-03-18 21:17:24: Nonuniformity across the wafers Message-ID: On a full boat of new, bare SI using 900Cwet ox, there are 'hot spots' of thick oxide toward the tops of about 25% of the wafers. These got a std diff clean with 50:1 last. Maybe the diffuser could be checked. Thanks. From nppatil at snf.stanford.edu Thu Mar 20 00:04:46 2008 From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu) Date: Thu, 20 Mar 2008 00:04:46 -0700 Subject: Problem tylan2 SNF 2008-03-20 00:04:46: MFS Alarm Message-ID: I was running DRY1000 for 1hr. Expected 560A. Got 180A. There was a MFS alarm and the back panel indicated O2HI leak. From seymour at snf.stanford.edu Thu Mar 20 09:53:23 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Mar 2008 09:53:23 -0700 Subject: Comment tylan2 SNF 2008-03-20 09:53:23: working on the non uniformity problem Message-ID: I am replacing the mixing chamber and the injector. I looked at the O2 leak problem and checked connections on the monoblock circuit board and then adjusted O2 zero and did the auto zero routine. From latta at snf.stanford.edu Thu Mar 20 10:14:02 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Mar 2008 10:14:02 -0700 Subject: Shutdown tylan2 SNF 2008-03-20 10:14:01: Shutdown for testing of Wet recipes Message-ID: From mtang at snf.stanford.edu Fri Mar 21 09:31:31 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Mar 2008 09:31:31 -0700 Subject: Shutdown tylan2 SNF 2008-03-21 09:31:30: Shutdown Message-ID: From latta at snf.stanford.edu Fri Mar 21 09:49:08 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 09:49:08 -0700 Subject: Shutdown tylan2 SNF 2008-03-21 09:49:08: needs process qual Message-ID: From latta at snf.stanford.edu Fri Mar 21 13:32:06 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:32:06 -0700 Subject: Shutdown tylan2 SNF 2008-03-21 09:49:08: needs process qual Message-ID: Process qual completed. Loks good- see comments for details. From latta at snf.stanford.edu Fri Mar 21 13:32:27 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:32:27 -0700 Subject: Shutdown tylan2 SNF 2008-03-21 09:31:30: Shutdown Message-ID: Up for bidness... From latta at snf.stanford.edu Fri Mar 21 13:32:59 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:32:59 -0700 Subject: Shutdown tylan2 SNF 2008-03-20 10:14:01: Shutdown for testing of Wet recipes Message-ID: TCLCLEAN run without incident. Ok for qual From latta at snf.stanford.edu Fri Mar 21 13:33:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:33:24 -0700 Subject: Problem tylan2 SNF 2008-03-20 00:04:46: MFS Alarm Message-ID: MFC adjusted by Ray. From latta at snf.stanford.edu Fri Mar 21 13:34:18 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:34:18 -0700 Subject: Comment tylan2 SNF 2008-03-20 09:53:23: working on the non uniformity problem Message-ID: logged From latta at snf.stanford.edu Fri Mar 21 13:35:32 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 21 Mar 2008 13:35:32 -0700 Subject: Problem tylan2 SNF 2008-03-18 21:17:24: Nonuniformity across the wafers Message-ID: Torch, mixing chamber replaced, Hi O2 mfc adjusted and qual run. Did not get hot spots on wafers. Not sure what's going on here....