Problem tylan2 SNF 2008-11-18 00:08:04: extreme nonuniformity for wet800

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Nov 18 13:59:59 PST 2008


Not sure what is going on.  Ran a qual run and the results look good.  Example wafer looks to have had previous processing.  Also, there looks to be a particle iin the center of the nonuniformity rainbow.




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