From latta at snf.stanford.edu  Thu Oct  2 16:34:50 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 2 Oct 2008 16:34:50 -0700
Subject: Comment tylan2 SNF 2008-10-02 16:34:44: Oct Quals
Message-ID: <mailman.565.1356283649.4932.tylan2-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 964A  (expect about 1000A)
Within-a-wafer = 0.9%  (expect less than 5%)
Wafer-to-wafer = 0.9% (expect less than 5%)



From latta at snf.stanford.edu  Thu Oct  2 16:35:12 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 2 Oct 2008 16:35:12 -0700
Subject: Comment tylan2 SNF 2008-09-03 17:10:02: Sept quals
Message-ID: <mailman.566.1356283649.4932.tylan2-pcs@snf.stanford.edu>

to the archives...



From ahazeghi at snf.stanford.edu  Mon Oct 13 20:34:18 2008
From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu)
Date: Mon, 13 Oct 2008 20:34:18 -0700
Subject: Problem tylan2 SNF 2008-10-13 20:34:17: quartz wand is broken
Message-ID: <mailman.567.1356283649.4932.tylan2-pcs@snf.stanford.edu>

also there is pieces  of shattered quartz boat(?) in the loading area



From rshyam at snf.stanford.edu  Tue Oct 14 02:47:55 2008
From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu)
Date: Tue, 14 Oct 2008 02:47:55 -0700
Subject: Shutdown tylan2 SNF 2008-10-14 02:47:55: tube 2 I/O error
Message-ID: <mailman.568.1356283649.4932.tylan2-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Tue Oct 14 08:12:58 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 14 Oct 2008 08:12:58 -0700
Subject: Comment tylan2 SNF 2008-10-14 08:12:57: reset cpu reloaded recipe
Message-ID: <mailman.569.1356283649.4932.tylan2-pcs@snf.stanford.edu>

running wet800 recipe



From tberg at snf.stanford.edu  Tue Oct 14 10:55:23 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 14 Oct 2008 10:55:23 -0700
Subject: Shutdown tylan2 SNF 2008-10-14 02:47:55: tube 2 I/O error
Message-ID: <mailman.570.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Reset slave cpu, loaded and ran wet800 no problems



From tberg at snf.stanford.edu  Tue Oct 14 10:55:38 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 14 Oct 2008 10:55:38 -0700
Subject: Comment tylan2 SNF 2008-10-14 08:12:57: reset cpu reloaded recipe
Message-ID: <mailman.571.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Reset slave cpu, loaded and ran wet800 no problems



From tberg at snf.stanford.edu  Wed Oct 15 06:38:28 2008
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 15 Oct 2008 06:38:28 -0700
Subject: Problem tylan2 SNF 2008-10-13 20:34:17: quartz wand is broken
Message-ID: <mailman.572.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Wand replaced



From ajamo at snf.stanford.edu  Thu Oct 30 16:46:24 2008
From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu)
Date: Thu, 30 Oct 2008 16:46:24 -0700
Subject: Comment tylan2 SNF 2008-10-30 16:46:24: Bad Wet 1050 oxidation last night
Message-ID: <mailman.573.1356283649.4932.tylan2-pcs@snf.stanford.edu>

I ran a 2 hour oxidation using wet 1050 on Tylan 2 last night and the wafers came out massively under-oxidized and had some purple oxidation type spots/patches.  Not sure what happened, used new wafers that went through diffusion clean prior to loading. 



From nharjee at snf.stanford.edu  Fri Oct 31 16:54:32 2008
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Fri, 31 Oct 2008 16:54:32 -0700
Subject: Comment tylan2 SNF 2008-10-31 16:54:31: 25 min WET950 seems ok
Message-ID: <mailman.574.1356283649.4932.tylan2-pcs@snf.stanford.edu>

Desired ~1245A, measured ~1190 A.