Comment tylan2 SNF 2008-10-30 16:46:24: Bad Wet 1050 oxidation last night

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Thu Oct 30 16:46:24 PDT 2008


I ran a 2 hour oxidation using wet 1050 on Tylan 2 last night and the wafers came out massively under-oxidized and had some purple oxidation type spots/patches.  Not sure what happened, used new wafers that went through diffusion clean prior to loading. 




More information about the tylan2-pcs mailing list